Published October 30, 2007
Patented is a barrier film comprising a base material film and a barrier layer on at least one side surface of the base material film. The barrier layer comprises a water repellent layer and a dense layer. The water repellent layer is a silicon oxide carbide film with the atomic percent of Si:O:C in a range of 100:40 to 120:80 to 160, and a 2 to 300 nm thickness. The dense layer is a silicon oxide carbide film with the atomic percent of Si:O:C in a range of 100:100 to 200:5 to 100, and a 5-300 nm thickness. The base material is a resin film having a 5-500 Ìm thickness. The barrier layer has a laminated structure with the dense layer sandwiched between two water repellent layers.