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Vision-Based Wafer Pre-Aligner

November 30, -0001

Cognex Corporation has introduced the In-Sight 1820 vision-based wafer pre-aligner. Utilizing proprietary Cognex NotchMaxTM alignment technology, the 1820 vision system provides precise non-contact measurement of wafer position and orientation that is faster and more accurate than comparably priced me­chanical systems.

The In-Sight 1820 determines wafer position and orientation in less than half a second while mechanical pre-aligners must typically spin wafers for several seconds. NotchMax, the newest member of Cognex’s industry-leading PatMax family of geometric pattern finding technologies, aligns wafers with a center position accuracy of +/- 15m and an orientation accuracy of +/- 0.05 degrees. More accurate pre-alignment saves fine alignment steps inside a process tool to boost throughput.

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